VACGEN MD5 series leak valves are used to precise control flow of gas into a vacuum system from an external source and operates in a high vacuum range.
The MD5 Series uses a stellite-faced knife edge and nickel diaphragm to make the UHV seal.
These materials give this valve the properties of being able to both withstand hot or corrosive materials and make it capable of handling high inlet pressures of up to 10 bar for high stability.
Valve can withstand hot or corrosive gases
High inlet pressure (up to 10 bar)
Low internal volume
Operating pressure range from 1 bar to 10-7 mbar
Bakeable to 450°C
304L stainless steel body with Nickel sealing disc
|All Metal Right Angled Leak Valves (MD5 Series)|
|DN Type||OD FlangeAxial mm||OD Flange Radial mm||Max Inlet Pressure||Operating Pressure Max||Operating Pressure Min||Open Conductance ls-1||Closed Leak Rate mbar.l.s-1||Bakeout Temp °C Open||Bakeout Temp °C Closed||A offset mm||Order Code|
|DN19||34 (Tapped base flange)||34||10 bar||1 bar||1 x 10-7 mbar||0.1||1x10-12||450°C*||250°C*||6.5||ZMD95|
|DN40||70 (Clear base flange)||34||10 bar||1 bar||1 x 10-7 mbar||0.1||1x10-12||450°C*||250°C*||18||ZMD9538|
|*When all ports of the valve are under vacuum|
To make a leak tight UHV seal between two conflat flanges, a gasket is required. Our gaskets are manufactured from quality controlled precision sheet material.
This group can be subdivided into two basic valve types; right angled all metal valves and the right angled elastomer sealed valves.