Ultra stable modular 54mm bore dual bellows manipulator for vertical or horizontal mount. Modular XYZ manipulator with NW63CF(114mm OD) conflat flange travelling. 54mm clear bore. Z travel 100mm to 1000mm; ±25 mm XY travel. Manual and motorisation options.
Z travels available from 100mm to 1000mm
Hinged Travelling flange 114mm OD conflat flange
54mm clear bore with full +/-25mm XY travel
Large load capacity
The X-axis actuator positions can be moved to the opposite side for convenience.
Bakeable to 230°C
Operating pressure 1 bar to 10-11 mbar
Leak rate <1x10-10 mbar l-s