ProductsRotary Platforms

Differentially Pumped Rotary Feedthrough

Differentially pumped rotary feedthroughs (DPRF) allow the airside flange to continuously rotate whilst the mounting flange is attached to the chamber. The vacuum seal is maintained by a secondary vacuum pumped interspace. Three versions of DPRF are available; coarse, manual high precision, and motorised high precision, in 70mm OD, 114mm OD and 152mm OD conflat flange options.

 

 

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