ProductsFast-Entry Air Lock Door

Fast Entry Air Lock Door

The HD range of fast entry lock doors can be used to load items into a prep chamber. The door is sealed by a reuseable Viton® O-ring. This is an ideal solution for a load lock to keep the main system under UHV conditions. 

 

 

HDV Viewport Door

The HDV range has a Kodial® glass viewport mounted into the door to allow internal viewing. The doors are designed to replace a standard Conflat flange, so they can be easily exchanged should, for example, a higher system bakeout temperature is required. 

Fast Entry Air Lock Door 
HDV Viewport Door Style
Mounting flange mmA mmB mmC mmD mmE mmF mmG mmJ mmK mmL mmM mmOrder Code 
11461.228.5378.565.873.571.969386427.9ZHD64V
15299.430.54011.582.390.391.388.5647635.4ZHD100V
203149.732.547.513.5112.5120.5116.8121.890107.539.5ZHD150V
Fast Entry Air Lock Door
HD Plain Door Style
Mounting flange mmA mmB mmC mmD mmE mm F mmG mmJ mmOrder Code
11461.228.5378.565.873.571.969ZHD64
15299.430.54011.582.390.391.388.5ZHD100
203149.732.547.513.5112.5120.5116.8121.8ZHD150

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