| Initial sticking coefficient ¹ | ||
| Gas | 300 K (room Temp) | 78 K (Liquid Nitrogen temp) |
| H2 | 0.06 | 0.4 |
| D2 | 0.01 | 0.2 |
| H2O | 0.5 | - |
| CO | 0.7 | 0.95 |
| N2 | 0.3 | 0.7 |
| O2 | 0.8 | 1 |
| CO2 | 0.5 | 0 |
| He | 0 | 0 |
| Ar | 0 | 0 |
| CH4 | 0 | 0.05 |
| 1 For fresh film from TSP. |
| Displaced Gas | |||||
| Gas being Pumped |
CH4 | N2 | H2 | CO | O2 |
| CH4 | - | No | No | No | No |
| N2 | Yes | - | No | No | No |
| H2 | Yes | Yes | - | No | No |
| CO | Yes | Yes | Yes | - | No |
| O2 | Yes | Yes | Yes | Yes | No |
| i.e. Order of preference, O2, CO, H2, N2, CH4. |
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