Chamber Manufacturing and Processing

Once customer agreed drawings have been produced the chamber is fabricated from the required material using CNC and manual machines. To ensure that the high quality standards are met, VG Scienta utilises state of the art manufacturing equipment, metal joining technology and expertise, as well as surface treatment methods and cleaning processes.

Manufacturing Capabilities Include:

Turning 3D CAM and DNC Drilling and reaming
Boring Surface grinding Rolling
Tapping and threading Milling Laser cutting (CNC)

Surface Treatment Capabilities Include:

  • Bead blasting
  • Electro-polishing
  • Hand polishing of seal faces

Metal Joining Technology Includes:

  • TIG welding
  • Brazing
  • E-beam welding

Assembly and Cleaning Technology Facilities Including:

  • Class 10,000 instrument assembly
  • A large clean chamber assembly area fitted with 2-ton hoist system
  • De-greasing tank 2m x 1m x 1m deep (work in progress cleaning)
  • Acid soad tank: (for removing weld oxides) 3m x 3m x 1m deep
  • Town water soak tank: 3m x 3m x 1m deep
  • Two further water rinse tanks: 1.5m x 1.5m x 1.5m
  • Hot de-ionised water ultrasonic tank: 1.5m x 1.5m x 1.5m
  • Large steam clean facility which includes detergent wash and water rinse at 140°C

Test and Inspection Equipment Capability Includes

  • 3D computerised measuring systems
  • Helium leak detector units
  • Automated chamber bakeout oven with the following capabilities:
    • Oven size: 3m x 2m x 2m
    • Maximum temp: 450°C
    • Adjustable ramp up/down rates
    • Turbo pumping rig attached
    • 200AMU Residual Gas Analyser for gas scans before/ during/ after bakeout
    • Continual UHV pressure monitor
    • Helium soak facility with continuous leak checking and gas monitoring capability

Quality Control

  • Full lot traceability of construction matrials if required
  • All chambers follow stringent quality procedures with full document traceability
  • Quality plans to meet customer needs can be produced if required

Inspection

  • Each chamber is baked at 150°C and then leak tested using helium mass spectrometer to 10-10mbar.l.s-1 leak rates
  • All chambers are leak checked, inspected and UHV cleaned prior to shipment

VG Scienta adds value to ensure all your service expectations are exceeded.